Modeling the extraction of sputtered species out of a pulsed hollow cathode
Institution: | KTH Royal Institute of Technology |
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Department: | |
Year: | 2011 |
Keywords: | Natural Sciences; Physical Sciences; Fusion, Plasma and Space Physics; Naturvetenskap; Fysik; Fusion, plasma och rymdfysik; Physics, Chemistry, Mathematics; fysik/kemi/matematik; Master of Science - Electrophysics; Teknologie masterexamen - Elektrofysik |
Record ID: | 1354942 |
Full text PDF: | http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-91538 |