AbstractsEngineering

The purpose of this thesis is to identify a solution for one of the several mechanical concerns that Varian Semiconductor Equipment is facing to achieve its goal. Managers and engineers are trying to lead Varian Semiconductor Equipment to a flow line shipment program, the intent being to eliminate the clean room area and ship all of the components of the ion implanter directly from the flow line to the customer, without the currently necessary step of a final assembly. In particular this work examines the correct alignment of the source chamber inside the terminal module prior to the final assembly of ion implantation equipment. In the flow line shipment context, the correct alignment of subassembly components becomes a critical aspect and needs to be checked before a shipment, since assembly errors or out of specification components from suppliers may lead to long delays and reworks. This last aspect cannot be ignored, since if adjustments and modifications can easily be accomplished in the flow line without conspicuous waste of time, the same cannot be said in the field, thousands miles away from the factory. Specifically, the contribution of the project is to achieve the right orientation of the source chamber in relation to the position of the feet of the terminal module, by designing a mechanical fixture. The tool has been conceived to be used directly in the terminal module flow line, in order to allow technicians to quickly perform a correct alignment and easily point out any possible misalignment due to bad components or assembly errors. The main components of the fixture are the jig that checks the position of the insulators and a vertical target where two lasers shoot to align the source chamber.