AbstractsEngineering
Novel Nanometer Precision Planar Positioning Stage using Pre-sliding Friction:
| Institution: | Delft University of Technology |
|---|---|
| Department: | |
| Year: | 2015 |
| Keywords: | Nanometer Precision; Planar Positioning Stage; Pre-sliding Friction |
| Record ID: | 1253139 |
| Full text PDF: | http://resolver.tudelft.nl/uuid:6ba67749-2842-409c-9a1a-4449e5ede0f8 |
Abstract
